Laser Scanning 3D surface Measurement System is using confocal microscope technolgy which can do the optical cross-section for receiving clear image of depth of devices; morevoer, researchers can obtain the 3D surface through 3D reconstruction algorithm as well. The resolution of XYZ direction can achieve nm scale which is suitable for the industrail and production line, for example, 3D surface measurement and defects examination for transparent materials, PCB, PCBA, Epitaxial slice, Solar cell and so on. Improve the manufacturing process and enhance the product quality. 

Features 

• Microlens surface examination
• Ultra high detection sensitivity: fs level  
• Non-desctructive and high resolution PL image
• Automatic Z axis control system, resolution for cross section: 10 nm
• Can measure the surface and dimension of busbar, suede of a silicon wafer, and pinhole